Scranton, Greggory

InstitutionLawrence Berkeley National Lab
DepartmentMaterials Sciences
Address1 Cyclotron Road
Berkeley CA 94720
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    1. Scranton G, Bhargava S, Ganapati V, Yablonovitch E. Single spherical mirror optic for extreme ultraviolet lithography enabled by inverse lithography technology. Opt Express. 2014 Oct 20; 22(21):25027-42. PMID: 25401536.
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