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    Scranton, Greggory

    TitleUC GSRA
    SchoolLawrence Berkeley National Lab
    DepartmentMaterials Sciences
    Address1 Cyclotron Road
    Berkeley CA 94720
    Phone319/621-6021
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      1. Scranton G, Bhargava S, Ganapati V, Yablonovitch E. Single spherical mirror optic for extreme ultraviolet lithography enabled by inverse lithography technology. Opt Express. 2014 Oct 20; 22(21):25027-42. PMID: 25401536.
        View in: PubMed
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